Photoresist Chemicals Carbamic acid, [5-[2,3-dihydro-1-hydroxy-3-oxo-2-[(1R)-1-phenylethyl]-1H-isoindol-1-yl]- 1H-benzimidazol-2-yl]-, methyl ester Cas：870601-35-7 Molecular Formula：C25H22N4O4