Photoresist Chemicals Urea, N-[4-[1-[(2,6-difluorophenyl)methyl]-1,2,3,4-tetrahydro-5-[[(2-methoxyeth yl)methylamino]methyl]-3-[2-(1-methylethoxy)ethyl]-2,4-dioxothieno[2,3-d ]pyrimidin-6-yl]phenyl]-N’-ethyl- Cas:577781-92-1 Molecular Formula:C32H39F2N5O5S