Photoresist Chemicals 1H-Benzimidazole, 2-[[[4-[2-(8-methyl-1,4,7,9-tetraoxaspiro[4.5]dec-8-yl)ethoxy]-2-pyridinyl] methyl]sulfinyl]-, sodium salt Cas:913695-59-7 Molecular Formula:C22H25N3O6S.Na