Photoresist Chemicals Pyrazolo[3,4-d]azepine-6(2H)-carboxylic acid, 4,5,7,8-tetrahydro-2-[4-(3-methyl-2-oxo-1-imidazolidinyl)phenyl]-, 1,1-dimethylethyl ester Cas：928775-19-3 Molecular Formula：C22H29N5O3