Photoresist Chemicals Urea,N-[2-[bis(2-chloroethyl)amino]tetrahydro-2-oxido-2H-1,3,2-oxazaphosphorin-4-yl]-N’-(4-chlorophenyl)-N-hydroxy- Cas：97139-30-5 Molecular Formula：C14H20 Cl3 N4 O4 P