Photoresist Chemicals Urea, N-[4-chloro-3-(trifluoromethyl)phenyl]-N’-[2-[[6-methoxy-7-[3-(4-methyl-1- piperazinyl)propoxy]-4-quinazolinyl]amino]-6-benzoxazolyl]- Cas:894426-11-0 Molecular Formula:C32H32ClF3N8O4