Photoresist Chemicals Urea, N-[4-[1-[(2,6-difluorophenyl)methyl]-5-[[(2-ethoxyethyl)methylamino]meth yl]-1,2,3,4-tetrahydro-2,4-dioxo-3-phenylthieno[2,3-d]pyrimidin-6-yl]phen yl]-N’-ethyl- Cas:577780-62-2 Molecular Formula:C34H35F2N5O4S