Photoresist Chemicals Urea, N-[4-[1-[(2,6-difluorophenyl)methyl]-1,2,3,4-tetrahydro-5-[[methyl[(1S)-1- phenylethyl]amino]methyl]-2,4-dioxo-3-phenylthieno[2,3-d]pyrimidin-6-yl] phenyl]-N’-methoxy- Cas:737790-25-9 Molecular Formula:C37H33F2N5O4S