Photoresist Chemicals Urea, N-(2-(bis(2-chloroethyl)amino)tetrahydro-2H-1,3,2-oxazaphosphorin-4-yl)-N-(3,4-dichlorophenyl)-N-hydroxy-, P-oxide Cas：97139-39-4 Molecular Formula：Urea, N-(2-(bis(2-chloroethyl)amino)tetrahydro-2H-1,3,2-oxazaphosphorin-4-yl)-N-(3,4-dichlorophenyl)-N-hydroxy-, P-oxide