Photoresist Chemicals Urea, N-[(1R,2S)-2-[[3-[(4-chlorophenyl)methyl]-1-azetidinyl]methyl]cyclohexyl] -N’-(5-ethyl-1,3,4-thiadiazol-2-yl)-, rel- Cas：848643-04-9 Molecular Formula：C22H30ClN5OS