Photoresist Chemicals Urea, N-[(1R,2R)-2-[[3-(3,4-dichlorophenoxy)-1-azetidinyl]methyl]cyclohexyl]- N’-(2-ethyl-2H-tetrazol-5-yl)-, rel- Cas:848643-67-4 Molecular Formula:C20H27Cl2N7O2