Photoresist Chemicals TIANFUCHEM-Carbamic acid, [5-[2-(3-chloro-2-fluorophenyl)-2,3-dihydro-1-hydroxy-3-oxo-1H-isoindol -1-yl]-1H-benzimidazol-2-yl]-, (octahydro-2H-quinolizin-1-yl)methyl ester Cas:870603-35-3 Molecular Formula:C32H31ClFN5O4