Photoresist Chemicals TIANFUCHEM-Carbamic acid, [(1R)-2-[[(4S)-2,2-dimethyl-1,3-dioxolan-4-yl]methoxy]-1-[[[(1,1-dimethyl ethyl)diphenylsilyl]oxy]methyl]ethyl]-, 1,1-dimethylethyl ester Cas:651031-09-3 Molecular Formula:C30H45NO6Si