Photoresist Chemicals TIANFUCHEM-2H-Pyrido[3,2-b]-1,4-oxazin-3(4H)-one, 6-[[5-fluoro-2-[[1-methyl-2-(4-methyl-1-piperazinyl)-1H-benzimidazol-5-yl ]amino]-4-pyrimidinyl]amino]-2,2-dimethyl- Cas:841292-57-7 Molecular Formula:C26H29FN10O2