Photoresist Chemicals TIANFUCHEM-2-Octenoic acid, 7-[[(1,1-dimethylethyl)dimethylsilyl]oxy]-5-(methoxymethoxy)-, (1R)-1-methyl-3-butenyl ester, (2E,5S,7R)- Cas:877474-16-3 Molecular Formula:C21H40O5Si