Photoresist Chemicals TIANFU-CHEM 2,4(1H,3H)-Pyrimidinedione, 1-[2-[(2Z)-2-[[[(1,1-dimethylethyl)dimethylsilyl]oxy]methyl]cyclobutylidene ]ethyl]-5-methyl- Cas：918415-49-3 Molecular Formula：C18H30N2O3Si