Photoresist Chemicals Thieno[3,2-b]pyridine-6-carboxamide, 3-(azidomethyl)-2-(chloromethyl)-N-[(4-chlorophenyl)methyl]-4,7-dihydro -4-methyl-7-oxo- Cas:566948-90-1 Molecular Formula:C18H15Cl2N5O2S