Photoresist Chemicals Thieno[2,3-d]pyrimidine-6-carboxylic acid, 1,2,3,4-tetrahydro-5-methyl-4-oxo-3-[3-(1-piperidinyl)propyl]-2-thioxo-, methyl ester Cas:689770-02-3 Molecular Formula:C17H23N3O3S2