Photoresist Chemicals Thiazolo[5,4-f][1,4]oxazepine-6-carboxamide, N-cyclohexyl-5,6,7,8-tetrahydro-6-methyl-8-oxo-2-phenyl-7-(phenylmeth yl)- Cas：868879-87-2 Molecular Formula：C27H29N3O3S