Photoresist Chemicals Spiro[7-azabicyclo[2.2.1]heptane-2,2′-[1,3]dioxolane]-7-carboxylic acid, 6-(6-chloro-3-pyridinyl)-, 1,1-dimethylethyl ester, (1R,4S,6S)-rel- Cas:561001-62-5 Molecular Formula:C18H23ClN2O4