Photoresist Chemicals Pyrazolo[3,4-d]azepine-6(2H)-carboxylic acid, 3-(4-chlorophenyl)-2-(cyclohexylmethyl)-4,5,7,8-tetrahydro-, 1,1-dimethylethyl ester Cas:851377-29-2 Molecular Formula:C25H34ClN3O2