Photoresist Chemicals Pyrazolo[3,4-d]azepine-6(2H)-carboxylic acid, 3-(4-chlorophenyl)-2-[(5-chloro-2-thienyl)methyl]-4,5,7,8-tetrahydro-, 1,1-dimethylethyl ester Cas:851377-33-8 Molecular Formula:C23H25Cl2N3O2S