Photoresist Chemicals Propanediamide, N-[(3S)-5-(3,5-difluorobenzoyl)-2,3,4,5-tetrahydro-1-methyl-2-oxo-1H-1, 5-benzodiazepin-3-yl]-2-methyl-N’-(2,2,3,3,3-pentafluoropropyl)- Cas:847926-19-6 Molecular Formula:C24H21F7N4O4