Photoresist Chemicals Propanediamide, N-[(3S)-5-(2,2-dimethyl-1-oxopropyl)-2,3,4,5-tetrahydro-1-methyl-2-oxo- 1H-1,5-benzodiazepin-3-yl]-2-methyl-N’-(2,2,3,3,3-pentafluoropropyl)- Cas:847927-59-7 Molecular Formula:C22H27F5N4O4