Photoresist Chemicals Pregnan-20-one, 3,11,21-tris[(trimethylsilyl)oxy]-, O-(phenylmethyl)ox ime, (3beta,5alpha,11beta)- Cas：57325-99-2 Molecular Formula：Pregnan-20-one, 3,11,21-tris[(trimethylsilyl)oxy]-, O-(phenylmethyl)ox ime, (3beta,5alpha,11beta)-