Photoresist Chemicals Piperidine, 4-[[4-[(3-chloro-2-fluorophenyl)amino]-6-methoxy-7-quinazolinyl]oxy]-1-[( 2S)-2-hydroxy-3,3-dimethyl-1-oxobutyl]- Cas:848439-70-3 Molecular Formula:C26H30ClFN4O4