Photoresist Chemicals Piperazinone, 4-[trans-4-[4-amino-5-[3-fluoro-4-[(5-methyl-2-benzoxazolyl)amino]phen yl]-7H-pyrrolo[2,3-d]pyrimidin-7-yl]cyclohexyl]-1-methyl- Cas:862726-41-8 Molecular Formula:C31H33FN8O2