Photoresist Chemicals Piperazine, 1-([1,1′-biphenyl]-3-ylcarbonyl)-4-[6-ethyl-2-[[2-hydroxy-1-(hydroxymethyl )ethyl]amino]thieno[2,3-d]pyrimidin-4-yl]- Cas：911224-61-8 Molecular Formula：C28H31N5O3S