Photoresist Chemicals Phosphonic acid, [2-[5-[2-[5-methyl-2-(4-pyridinyl)-4-oxazolyl]ethoxy]-2-pyridinyl]-2-(2-oxid o-1,3,2-dioxaphosphorinan-2-yl)ethyl]-, diethyl ester Cas:848936-63-0 Molecular Formula:C25H33N3O8P2