Photoresist Chemicals Phosphinic acid, [[[[6-[[[(4-chlorophenyl)methyl]amino]carbonyl]-4,7-dihydro-3,4-dimethyl- 7-oxothieno[3,2-b]pyridin-2-yl]methyl]methylamino]methyl]phenyl- Cas:566947-61-3 Molecular Formula:C26H27ClN3O4PS