Photoresist Chemicals Phenol, 4-[2-[(1,3-dihydro-2,2-dioxido-2,1-benzisothiazol-5-yl)amino]-4-thiazolyl] -2,6-bis(1,1-dimethylethyl)- Cas:841475-93-2 Molecular Formula:C24H29N3O3S2