Photoresist Chemicals Pentanamide,N-[3-(1,2,3,4,5,6-hexahydro-5-oxopyrido[2,3-d]pyridazin-8-yl)phenyl]-5-(methylamino)-, monomethanesulfonate Cas:590407-88-8 Molecular Formula:C19H25N5O2.CH4O3S