Photoresist Chemicals Pentanamide, N-(1-cyanocyclopropyl)-5,5,5-trifluoro-2-[[(1S)-2,2,2-trifluoro-1-[4′-(meth ylsulfonyl)[1,1′-biphenyl]-4-yl]ethyl]amino]-, (2S)- Cas:603142-52-5 Molecular Formula:C24H23F6N3O3S