Photoresist Chemicals Methanesulfonic acid, trifluoro-, (1Z)-3-[[(1,1-dimethylethyl)dimethylsilyl]oxy]-1-[2-[2-[[[(1,1-dimethylethyl) dimethylsilyl]oxy]methyl]-6-methyl-1,5-cyclohexadien-1-yl]ethyl]-2-methyl- 1-propenyl Cas:599174-96-6 Molecular Formula:C27H49F3O5SSi2