Photoresist Chemicals Methanesulfonamide, N-[4-[3-[4-(2,3-difluorophenyl)-5-isoxazolyl]-1H-pyrrolo[2,3-b]pyridin-5-yl ]-3-cyclohexen-1-yl]- Cas:849069-19-8 Molecular Formula:C23H20F2N4O3S