Photoresist Chemicals Methanesulfonamide, N-[2-[7-(2-butynyl)-2,3,6,7-tetrahydro-3-methyl-2,6-dioxo-8-(1-piperazin yl)-1H-purin-1-yl]ethyl]-, mono(trifluoroacetate) Cas:586407-78-5 Molecular Formula:C17H25N7O4S.C2HF3O2