Photoresist Chemicals Methanesulfonamide, N-[1,4-dihydro-6-(1-methyl-1H-pyrazol-4-yl)-2,4-dioxo-7-(trifluoromethyl) -3(2H)-quinazolinyl]- Cas:912574-30-2 Molecular Formula:C14H12F3N5O4S