Photoresist Chemicals L-Prolinamide, N-(methylsulfonyl)-L-alanyl-3-methyl-L-valyl-N-[(1R)-1,2,3,4-tetrahydro-1- naphthalenyl]-, mono(trifluoroacetate) Cas:876622-75-2 Molecular Formula:C25H38N4O5S.C2HF3O2