Photoresist Chemicals L-Phenylalaninamide, 3-[[(9H-fluoren-9-ylmethoxy)carbonyl]amino]-N-[(phenylmethoxy)carbon yl]-L-alanyl-4-chloro-N-(2,2-diethoxyethyl)-N-methyl- Cas:878273-77-9 Molecular Formula:C42H47ClN4O8