Photoresist Chemicals L-Alanine, 3-[[[7-[[4-(aminoiminomethyl)benzoyl]amino]-3,4-dihydro-2-methyl-3-oxo -2H-1,4-benzoxazin-2-yl]carbonyl]amino]-N-[(4-methylphenyl)sulfonyl]-, monoacetate Cas:847671-72-1 Molecular Formula:C28H28N6O8S.C2H4O2