Photoresist Chemicals Isoxazole, 3-[[difluoro[1-methyl-5-[(1-methylethyl)sulfonyl]-3-(trifluoromethyl)-1H-pyr azol-4-yl]methyl]sulfonyl]-4,5-dihydro-5,5-dimethyl- Cas:878204-06-9 Molecular Formula:C14H18F5N3O5S2