Photoresist Chemicals Ethanesulfonyl fluoride, 2-[[9-(acetyloxy)-1,1,2,2,3,3,4,4,5,5,6,6-dodecafluoro-8-iodononyl]oxy]- 1,1,2,2-tetrafluoro- Cas:92458-58-7 Molecular Formula:C13H8F17IO5S