Photoresist Chemicals Ethanaminium, N,N-diethyl-2-[[4-[(3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,10-heptadecafluoro decyl)oxy]-1,4-dioxo-2-butenyl]amino]-N-methyl-, (E)-, methyl sulfate Cas:91656-14-3 Molecular Formula:C21H24F17N2O3.CH3O4S