Photoresist Chemicals Cyclopropanecarboxylic acid, 3-(3-chloro-2,3,3-trifluoro-1-propenyl)-2,2-dimethyl-, (4,5-dihydronaphtho[1,2-b]thien-6-yl)methyl ester, cis- Cas:96475-12-6 Molecular Formula:C22H20ClF3O2S