Photoresist Chemicals Cyclohexanecarboxylic acid, 4-[[(2S,5S)-1-[[4-fluoro-2-[(4-fluorophenyl)amino]-6-benzoxazolyl]acetyl]- 5-(1-piperidinylmethyl)-2-pyrrolidinyl]methoxy]-, trans- Cas:877666-20-1 Molecular Formula:C33H40F2N4O5