Photoresist Chemicals Cyclohexanecarboxylic acid, 4-[[(1,1-dimethylethoxy)carbonyl]amino]-, 2-hydroxy-5-(3,5,7-trihydroxy-4-oxo-4H-1-benzopyran-2-yl)phenyl ester Cas:925912-51-2 Molecular Formula:C27H29NO10