Photoresist Chemicals Cyclohexanecarboxamide, N-hydroxy-5-(phenylmethylene)-2-[(4-phenyl-1-piperazinyl)carbonyl]-, (1S,2S,5E)-, mono(trifluoroacetate) (salt) Cas:851003-88-8 Molecular Formula:C25H29N3O3.C2HF3O2