Photoresist Chemicals CAS197523-78-7 (3aR,4S,5R,6aS)-4-((tert-butyldimethylsilyloxy)methyl)-5-(tetrahydro-2H-pyran-2-yloxy)hexahydro-2H-cyclopenta[b]furan-2-ol Cas：197523-78-7 Molecular Formula：