Photoresist Chemicals Carbamic acid, ethyl-, (3R,5R)-5-[[4-[[1-[(3-fluorophenyl)methyl]-1H-indazol-5-yl]amino]thieno[ 2,3-d]pyrimidin-6-yl]ethynyl]-3-pyrrolidinyl ester Cas:833477-56-8 Molecular Formula:C29H26FN7O2S