Photoresist Chemicals Carbamic acid, [5-fluoro-1,2-dihydro-1-[(2R,5S)-2-(hydroxymethyl)-1,3-oxathiolan-5-yl]- 2-oxo-4-pyrimidinyl]-, pentyl ester Cas：848940-61-4 Molecular Formula：C14H20FN3O5S